Research Catalog

Vacuum technology, thin films, and sputtering : an introduction

Title
  1. Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart.
Published by
  1. New York : Academic Press, 1983.
Author
  1. Stuart, R. V.

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Details

Description
  1. viii, 151 p. : ill.; 24 cm.
Subject
  1. Cathode sputtering (Plating process)
  2. Vacuum technology
  3. Thin films
Call number
  1. JSE 84-62
Note
  1. Includes index.
Author
  1. Stuart, R. V.
Title
  1. Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart.
Imprint
  1. New York : Academic Press, 1983.
LCCN
  1. 82013748
ISBN
  1. 0126747806
Research call number
  1. JSE 84-62
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