SEMICON/West, May 20-22, 1986, San Mateo, California : process and equipment reliability in the fab environment
- Title
- SEMICON/West, May 20-22, 1986, San Mateo, California : process and equipment reliability in the fab environment / presented by Semiconductor Equipment and Materials Institute, Inc.
- Published by
- Mountain View, Calif. : The Institute, [1986?]
- Author
Items in the library and off-site
Displaying 1 item
Status | Format | Access | Call number | Item location |
---|---|---|---|---|
Status | FormatText | AccessRequest in advance | Call numberJSF 88-563 | Item locationOffsite |
Details
- Additional authors
- Description
- x, 234 p. : ill.; 28 cm.
- Alternative title
- Technical proceedings, SEMICON/West.
- Process and equipment reliability in the fab environment.
- Subject
- Call number
- JSF 88-563
- Note
- Cover title: Technical proceedings, SEMICON/West 1986 ... .
- Bibliography (note)
- Includes bibliographical references.
- Conference
- SEMICON/West (1986 : San Mateo, Calif.)
- Title
- SEMICON/West, May 20-22, 1986, San Mateo, California : process and equipment reliability in the fab environment / presented by Semiconductor Equipment and Materials Institute, Inc.
- Imprint
- Mountain View, Calif. : The Institute, [1986?]
- Bibliography
- Includes bibliographical references.
- Added author
- Semiconductor Equipment and Materials Institute.
- Added title
- Technical proceedings, SEMICON/West.
- Process and equipment reliability in the fab environment.
- Research call number
- JSF 88-563