SEMICON/West, May 20-22, 1986, San Mateo, California : process and equipment reliability in the fab environment

Title
  1. SEMICON/West, May 20-22, 1986, San Mateo, California : process and equipment reliability in the fab environment / presented by Semiconductor Equipment and Materials Institute, Inc.
Published by
  1. Mountain View, Calif. : The Institute, [1986?]
Author
  1. SEMICON/West (1986 : San Mateo, Calif.)

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Details

Additional authors
  1. Semiconductor Equipment and Materials Institute.
Description
  1. x, 234 p. : ill.; 28 cm.
Alternative title
  1. Technical proceedings, SEMICON/West.
  2. Process and equipment reliability in the fab environment.
Subject
  1. Lithography, Electron beam > Congresses
  2. Semiconductors > Congresses
  3. Photolithography > Congresses
  4. Semiconductor wafers > Congresses
  5. Integrated circuits > Very large scale integration > Congresses
Call number
  1. JSF 88-563
Note
  1. Cover title: Technical proceedings, SEMICON/West 1986 ... .
Bibliography (note)
  1. Includes bibliographical references.
Conference
  1. SEMICON/West (1986 : San Mateo, Calif.)
Title
  1. SEMICON/West, May 20-22, 1986, San Mateo, California : process and equipment reliability in the fab environment / presented by Semiconductor Equipment and Materials Institute, Inc.
Imprint
  1. Mountain View, Calif. : The Institute, [1986?]
Bibliography
  1. Includes bibliographical references.
Added author
  1. Semiconductor Equipment and Materials Institute.
Added title
  1. Technical proceedings, SEMICON/West.
  2. Process and equipment reliability in the fab environment.
Research call number
  1. JSF 88-563
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