Research Catalog

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Title
  1. Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / edited by Vikram J. Kapoor, Kevin T. Hankins ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.
Published by
  1. Pennington, NJ (10 S. Main St., Pennington 08534-2696) : Electrochemical Society, c1987.
Author
  1. Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (2nd : 1986 : San Diego, Calif.)

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Additional authors
  1. Kapoor, Vikram J.
  2. Hankins, Kevin T.
  3. Electrochemical Society. Dielectrics and Insulation Division.
  4. Electrochemical Society. Electronics Division.
Description
  1. x, 550 p. : ill.; 23cm.
Series statement
  1. Proceedings / Electrochemical Society ; v. 87-10
Uniform title
  1. Proceedings (Electrochemical Society) ; v. 87-10.
Subject
  1. Silica > Congresses
  2. Silicon oxide films > Congresses
  3. Silicon nitride > Congresses
  4. Thin film devices > Congresses
Call number
  1. JSE 88-2539
Note
  1. Papers presented at the 2nd symposium held October 20-24, 1986 in San Diego, Calif.
Bibliography (note)
  1. Includes bibliographies and indexes.
Conference
  1. Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (2nd : 1986 : San Diego, Calif.)
Title
  1. Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / edited by Vikram J. Kapoor, Kevin T. Hankins ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.
Imprint
  1. Pennington, NJ (10 S. Main St., Pennington 08534-2696) : Electrochemical Society, c1987.
Series
  1. Proceedings / Electrochemical Society ; v. 87-10
  2. Proceedings (Electrochemical Society) ; v. 87-10.
Bibliography
  1. Includes bibliographies and indexes.
Added author
  1. Kapoor, Vikram J.
  2. Hankins, Kevin T.
  3. Electrochemical Society. Dielectrics and Insulation Division.
  4. Electrochemical Society. Electronics Division.
LCCN
  1. 87082368
Research call number
  1. JSE 88-2539
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