Research Catalog

Laser microfabrication : thin film processes and lithography

Title
  1. Laser microfabrication : thin film processes and lithography / edited by Daniel J. Ehrlich, Jeffrey Y. Tsao.
Published by
  1. Boston : Academic Press, c1989.

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Details

Additional authors
  1. Ehrlich, Daniel J.
  2. Tsao, Jeffrey Y.
Description
  1. xii, 587 p., [1] leaf of plates : ill.; 24 cm.
Subject
  1. Lasers > Industrial applications
  2. Microlithography
  3. Thin film devices > Design and construction
Call number
  1. JSE 89-1648
Bibliography (note)
  1. Includes bibliographical references.
Title
  1. Laser microfabrication : thin film processes and lithography / edited by Daniel J. Ehrlich, Jeffrey Y. Tsao.
Imprint
  1. Boston : Academic Press, c1989.
Bibliography
  1. Includes bibliographical references.
Added author
  1. Ehrlich, Daniel J.
  2. Tsao, Jeffrey Y.
LCCN
  1. 88024215
ISBN
  1. 0122334302
Research call number
  1. JSE 89-1648
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