Research Catalog

Polysilicon thin films and interfaces : symposium held April 17-19, 1990, San Francisco, California, U.S.A.

Title
  1. Polysilicon thin films and interfaces : symposium held April 17-19, 1990, San Francisco, California, U.S.A. / editors, Theodore Kamins, Bruha Raicu, Carl V. Thompson.
Published by
  1. Pittsburgh, Pa. : Materials Research Society, c1990.

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Details

Additional authors
  1. Kamins, Theodore I.
  2. Raicu, Bruha.
  3. Thompson, C. V. (Carl V.)
  4. Materials Research Society.
Description
  1. xiii, 403 p. : ill.; 24 cm.
Series statement
  1. Materials Research Society Symposium proceedings ; v. 182
Uniform title
  1. Materials Research Society symposia proceedings ; v. 182.
Subject
  1. Thin film devices > Congresses
  2. Integrated circuits > Materials > Congresses
  3. Silicon > Electric properties > Congresses
Call number
  1. JSE 92-1828
Bibliography (note)
  1. Includes bibliographical references and indexes.
Title
  1. Polysilicon thin films and interfaces : symposium held April 17-19, 1990, San Francisco, California, U.S.A. / editors, Theodore Kamins, Bruha Raicu, Carl V. Thompson.
Imprint
  1. Pittsburgh, Pa. : Materials Research Society, c1990.
Series
  1. Materials Research Society Symposium proceedings ; v. 182
  2. Materials Research Society symposia proceedings ; v. 182.
Bibliography
  1. Includes bibliographical references and indexes.
Added author
  1. Kamins, Theodore I.
  2. Raicu, Bruha.
  3. Thompson, C. V. (Carl V.)
  4. Materials Research Society.
LCCN
  1. 90044401
ISBN
  1. 1558990712
Research call number
  1. JSE 92-1828
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