The physics of submicron lithography
- Title
- The physics of submicron lithography / Kamil A. Valiev.
- Published by
- New York : Plenum Press, c1992.
- Author
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Status | Format | Access | Call number | Item location |
---|---|---|---|---|
Status | FormatText | AccessRequest in advance | Call numberJSF 92-934 | Item locationOffsite |
Details
- Description
- xi, 493 p. : ill.; 26 cm.
- Series statement
- Microdevices
- Subject
- Call number
- JSF 92-934
- Bibliography (note)
- Includes bibliographical references and index.
- Author
- Valiev, K. A. (Kamilʹ Akhmetovich)
- Title
- The physics of submicron lithography / Kamil A. Valiev.
- Imprint
- New York : Plenum Press, c1992.
- Series
- Microdevices
- Bibliography
- Includes bibliographical references and index.
- LCCN
- 91041122
- ISBN
- 0306435780
- Research call number
- JSF 92-934