The physics of submicron lithography

Title
  1. The physics of submicron lithography / Kamil A. Valiev.
Published by
  1. New York : Plenum Press, c1992.
Author
  1. Valiev, K. A. (Kamilʹ Akhmetovich)

Items in the library and off-site

Filter by

Displaying 1 item

StatusFormatAccessCall numberItem location
StatusFormatTextAccessRequest in advanceCall numberJSF 92-934Item locationOffsite

Details

Description
  1. xi, 493 p. : ill.; 26 cm.
Series statement
  1. Microdevices
Subject
  1. X-ray lithography
  2. Ion beam lithography
  3. Physics
  4. Lithography, Electron beam
Call number
  1. JSF 92-934
Bibliography (note)
  1. Includes bibliographical references and index.
Author
  1. Valiev, K. A. (Kamilʹ Akhmetovich)
Title
  1. The physics of submicron lithography / Kamil A. Valiev.
Imprint
  1. New York : Plenum Press, c1992.
Series
  1. Microdevices
Bibliography
  1. Includes bibliographical references and index.
LCCN
  1. 91041122
ISBN
  1. 0306435780
Research call number
  1. JSF 92-934
View in legacy catalog