Research Catalog

Details

Additional authors

1. Auciello, Orlando, 1945-
2. Engemann, Jürgen.
3. North Atlantic Treaty Organization. Scientific Affairs Division.
4. NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies (1992 : Bad Windsheim, Germany)

Description

1. xv, 633 p. : ill.; 25 cm.

Series statement

1. NATO ASI series. Series E, Applied sciences ; vol. 234

Uniform title

1. NATO ASI series. Series E, Applied sciences ; no. 234.

Subject

1. Thin film devices > Congresses
2. Thin films > Congresses

Call number

1. JSE 93-1716

Note

1. "Published in cooperation with NATO Scientific Affairs Division."
2. "Proceeding of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies Bad Windsheim, Germany September 21-October 2, 1992"--T.p. verso.

Bibliography (note)

1. Includes bibliographical references and index.

Title

1. Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices / edited by Orlando Auciello and Jürgen.

Imprint

1. Dordrecht ; Boston : Kluwer Academic, c1993.

Series

1. NATO ASI series. Series E, Applied sciences ; vol. 234
2. NATO ASI series. Series E, Applied sciences ; no. 234.

Bibliography

1. Includes bibliographical references and index.

Added author

1. Auciello, Orlando, 1945-
2. Engemann, Jürgen.
3. North Atlantic Treaty Organization. Scientific Affairs Division.
4. NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies (1992 : Bad Windsheim, Germany)

LCCN

1. 93020488 //r93

ISBN

1. 0792322657 (acid-free paper)

Research call number

1. JSE 93-1716