Research Catalog

Characterization in silicon processing

Title
  1. Characterization in silicon processing / editor, Yale Strusser ; contributing editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick.
Published by
  1. Boston : Butterworth-Heinemann ; Greenwich : Manning, c1993.

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Details

Additional authors
  1. Strausser, Yale.
Description
  1. xiii, 240 p. : ill.; 25 cm.
Series statement
  1. Materials characterization series
Subject
  1. Semiconductor films
  2. Electric conductors
  3. Surface chemistry
  4. Silicon
Call number
  1. JSE 94-759
Bibliography (note)
  1. Includes bibliographical references and index.
Title
  1. Characterization in silicon processing / editor, Yale Strusser ; contributing editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick.
Imprint
  1. Boston : Butterworth-Heinemann ; Greenwich : Manning, c1993.
Series
  1. Materials characterization series
Bibliography
  1. Includes bibliographical references and index.
Added author
  1. Strausser, Yale.
LCCN
  1. 93022784
ISBN
  1. 0750691727
Research call number
  1. JSE 94-759
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