Patterning of material layers in submicron region
- Title
- Patterning of material layers in submicron region / U.S. Tandon, W.S. Khokle.
- Published by
- New York : J. Wiley, 1993.
- Author
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Status | Format | Access | Call number | Item location |
---|---|---|---|---|
Status | FormatText | AccessRequest in advance | Call numberJSF 95-175 | Item locationOffsite |
Details
- Additional authors
- Description
- xii, 183 p. : ill. (some col.); 25 cm.
- Subject
- Call number
- JSF 95-175
- Bibliography (note)
- Includes bibliographical references and index.
- Author
- Tandon, U. S., 1952-
- Title
- Patterning of material layers in submicron region / U.S. Tandon, W.S. Khokle.
- Imprint
- New York : J. Wiley, 1993.
- Bibliography
- Includes bibliographical references and index.
- Added author
- Khokle, W. S.
- LCCN
- 92036072
- ISBN
- 0470220635 (J. Wiley)
- 8122405614 (Wiley Eastern)
- Research call number
- JSF 95-175