Research Catalog

Thin-film deposition : principles and practice

Title
  1. Thin-film deposition : principles and practice / Donald L. Smith.
Published by
  1. New York : McGraw-Hill, c1995.
Author
  1. Smith, Donald L. (Donald Leonard), 1944-

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Details

Description
  1. xxiii, 616 p. : ill.; 24 cm.
Subject
  1. Vapor-plating
  2. Thin film devices
  3. Thin films
Call number
  1. JSE 95-1179
Bibliography (note)
  1. Includes bibliographical references and index.
Author
  1. Smith, Donald L. (Donald Leonard), 1944-
Title
  1. Thin-film deposition : principles and practice / Donald L. Smith.
Imprint
  1. New York : McGraw-Hill, c1995.
Bibliography
  1. Includes bibliographical references and index.
Indexed term
  1. Thin films
LCCN
  1. 94047002 //r95
ISBN
  1. 0070585024
  2. 0071139133 (International ed.)
Research call number
  1. JSE 95-1179
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