Research Catalog

High vacuum production in the microelectronics industry

Title
  1. High vacuum production in the microelectronics industry / Pierre Duval.
Published by
  1. Amsterdam ; New York : Elsevier, 1988.
Author
  1. Duval, Pierre.

Items in the library and off-site

Filter by

Displaying 1 item

StatusFormatAccessCall numberItem location
Status
Request for on-site useRequest scan
How do I pick up this item and when will it be ready?
FormatTextAccessRequest in advanceCall numberJSF 96-576Item locationOffsite

Details

Additional authors
  1. Alcatel Vacuum Technology (Firm)
Description
  1. xiii, 222 p. : ill.; 25 cm.
Series statement
  1. Plasma technology ; 2
Subject
  1. Microelectronics
  2. Vapor-plating
  3. Vacuum technology
Call number
  1. JSF 96-576
Note
  1. "ALCATEL."
  2. Includes index.
Bibliography (note)
  1. Bibliography: p. 163-167.
Author
  1. Duval, Pierre.
Title
  1. High vacuum production in the microelectronics industry / Pierre Duval.
Imprint
  1. Amsterdam ; New York : Elsevier, 1988.
Series
  1. Plasma technology ; 2
Bibliography
  1. Bibliography: p. 163-167.
Added author
  1. Alcatel Vacuum Technology (Firm)
LCCN
  1. 89116745
ISBN
  1. 044442878X
Research call number
  1. JSF 96-576
View in legacy catalog