Research Catalog

Microlithography world.

Title
  1. Microlithography world.
Published by
  1. Port Washington, N.Y. : Penn Well Publication, published in cooperation with SPIE, 1992-

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StatusVol/dateFormatAccessCall numberItem location
Status
Request for on-site useRequest scan
How do I pick up this item and when will it be ready?
Vol/datev. 7-17, inc. (1998-2008)FormatTextAccessRequest in advanceCall numberJSM 98-51 v. 7-17, inc. (1998-2008)Item locationOffsite
Status
Request for on-site useRequest scan
How do I pick up this item and when will it be ready?
Vol/datev. 6, no. 1 (Win 1997)FormatTextAccessRequest in advanceCall numberJSM 98-51 v. 6, no. 1 (Win 1997)Item locationOffsite

Holdings

Location
  1. Schwarzman Building - Main Reading Room 315
Call number
  1. JSM 98-51
Notes
  1. Ceased with 2008.

Details

Additional authors
  1. Society of Photo-Optical Instrumentation Engineers.
Publication date
  1. Vol. 1, no. 1 (Mar./Apr. 1992)-
Description
  1. v. : ill.; 28 cm.
Alternative title
  1. Microlithogr. world
  2. Microlithography world
Subject
  1. Microlithography > Periodicals
  2. Masks (Electronics) > Periodicals
  3. Semiconductors > Design and construction > Periodicals
Call number
  1. JSM 98-51
Note
  1. Title from cover.
  2. Published: Tulsa, OK, Oct., Nov., Dec. 1993- .
Title
  1. Microlithography world.
Imprint
  1. Port Washington, N.Y. : Penn Well Publication, published in cooperation with SPIE, 1992-
Current frequency
  1. Quarterly, Jan./Feb./Mar. 1993-
Former frequency
  1. Bimonthly, Mar./Apr. 1992-<Sept./Oct. 1992>
Added author
  1. Society of Photo-Optical Instrumentation Engineers.
Abbreviated title
  1. Microlithogr. world
LCCN
  1. 93659127 sn 93035854
ISSN
  1. 1074-407X
Research call number
  1. JSM 98-51
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