Research Catalog

Laser-assisted microtechnology

Title
  1. Laser-assisted microtechnology / Simeon M. Metev, Vadim P. Veiko.
Published by
  1. Berlin ; New York : Springer, c1998.
Author
  1. Metev, S. M. (Simeon Metodiev)

Items in the library and off-site

Filter by

Displaying 1 item

StatusFormatAccessCall numberItem location
Status
Request for on-site useRequest scan
How do I pick up this item and when will it be ready?
FormatTextAccessRequest in advanceCall numberJSE 98-1241Item locationOffsite

Details

Additional authors
  1. Veĭko, V. P. (Vadim Pavlovich)
Description
  1. xii, 270 p. : ill.; 25 cm.
Series statement
  1. Springer series in materials science, 0933-033X ; 19
Uniform title
  1. Springer series in materials science ; v. 19.
Subject
  1. Manufacturing processes
  2. Lasers > Industrial applications
  3. Thin film devices > Design and construction
  4. Electronic industries > Technological innovations
  5. Micromachining
Call number
  1. JSE 98-1241
Bibliography (note)
  1. Includes bibliographical references and index.
Author
  1. Metev, S. M. (Simeon Metodiev)
Title
  1. Laser-assisted microtechnology / Simeon M. Metev, Vadim P. Veiko.
Imprint
  1. Berlin ; New York : Springer, c1998.
Edition
  1. 2nd, updated ed.
Series
  1. Springer series in materials science, 0933-033X ; 19
  2. Springer series in materials science ; v. 19.
Bibliography
  1. Includes bibliographical references and index.
Added author
  1. Veĭko, V. P. (Vadim Pavlovich)
LCCN
  1. 98026049
ISBN
  1. 354063973X (hardcover : alk. paper)
Research call number
  1. JSE 98-1241
View in legacy catalog