Research Catalog

Details

Additional authors

1. Bailey, Sheila G.
2. Wilt, David M.
3. DeAngelo, Frank L.
4. United States. National Aeronautics and Space Administration.

Description

1. 1 v.

Series statement

1. NASA case ; no. LEW-15, 760-1

Uniform title

1. NASA case ; LEW-15760-1.

Subject

1. Epitaxy
2. Etching
3. Indium phosphides
4. Removal
5. Substrates

Call number

1. READEX Microfiche NAS 1.71:LEW-15760-1

Note

1. Distributed to depository libraries in microfiche.
2. Shipping list no.: 95-0748-M.

Reproduction (note)

1. Microfiche.

Title

1. Preferentially etched epitaxial liftoff of InP material [microform] / inventor (s), Sheila G. Bailey, David M. Wilt, Frank L. DeAngelo.

Imprint

1. [Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1995]

Series

1. NASA case ; no. LEW-15, 760-1
2. NASA case ; LEW-15760-1.

Reproduction

1. Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1995] 1 microfiche.

Added author

1. Bailey, Sheila G.
2. Wilt, David M.
3. DeAngelo, Frank L.
4. United States. National Aeronautics and Space Administration.

Gpo item no.

1. 0830-J-10 (MF)

Sudoc no.

1. NAS 1.71:LEW-15760-1

Research call number

1. READEX Microfiche NAS 1.71:LEW-15760-1