Research Catalog

Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon

Title
  1. Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon [microform] / James D. Patterson.
Published by
  1. Hampton, Va. : National Aeronautics and Space Administration, Langley Research Center ; Springfield, VA : National Technical Information Service, distributor, [1997]
Author
  1. Patterson, James D. (James Deane), 1934-

Details

Additional authors
  1. Langley Research Center.
Description
  1. 1 v.
Series statement
  1. NASA technical paper ; 3702
Alternative title
  1. Micro mechanical voltage tunable Fabry Perot filters formed in (111) silicon
Subject
  1. Optical filters
  2. Tunable filters
  3. Optical properties
  4. Electroplating
  5. Electrostatics
  6. Silicon
  7. CMOS
  8. Electric potential
  9. Mirrors
  10. Silicon transistors
Call number
  1. READEX Microfiche NAS 1.60:3702
Note
  1. Shipping list no.: 98-0733-M.
Reproduction (note)
  1. Microfiche.
Author
  1. Patterson, James D. (James Deane), 1934-
Title
  1. Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon [microform] / James D. Patterson.
Imprint
  1. Hampton, Va. : National Aeronautics and Space Administration, Langley Research Center ; Springfield, VA : National Technical Information Service, distributor, [1997]
Series
  1. NASA technical paper ; 3702
Reproduction
  1. Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 2 microfiches.
Added author
  1. Langley Research Center.
Gpo item no.
  1. 0830-H-15 (MF)
Sudoc no.
  1. NAS 1.60:3702
Research call number
  1. READEX Microfiche NAS 1.60:3702
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