Research Catalog

Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP

Title
  1. Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP [microform] / Dragan M. Pantic ... [et al.] ; presented at the Dielectric Films on Compound Semiconductors Symposium sponsored by the Electrochemical Society, Honolulu, Hawaii, October 18-23, 1987.
Published by
  1. [Washington, D.C.] : NASA ; Springfield, Va. : For sale by the National Technical Information Service, [1990]

Available online

Details

Additional authors
  1. Pantic, Dragan M.
  2. Electrochemical Society
  3. United States. National Aeronautics and Space Administration
  4. Symposium on Dielectric Films on Compound Semiconductors
Description
  1. 15 p. : ill.; 28 cm.
Series statement
  1. NASA technical memorandum ; 102544
Subject
  1. Dielectric films
  2. Capacitance-voltage characteristics
  3. Electron beams
  4. Indium phosphides
  5. Irradiation
  6. Phosphorus
  7. Plasmas (Physics)
  8. Radiation damage
  9. Vapor deposition
Call number
  1. GPO Microfiche NAS 1.15:102544
Note
  1. Cover title.
Bibliography (note)
  1. Includes bibliographical references (p. 13).
Additional formats (note)
  1. Also available via Internet from the NASA Technical Report Server web site. Address as of 5/9/06: http://ntrs.nasa.gov/archive/nasa/casi.ntrs.nasa.gov/19900011077%5F1990011077.pdf ; current access is available via PURL.
Reproduction (note)
  1. Microfiche.
Title
  1. Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP [microform] / Dragan M. Pantic ... [et al.] ; presented at the Dielectric Films on Compound Semiconductors Symposium sponsored by the Electrochemical Society, Honolulu, Hawaii, October 18-23, 1987.
Imprint
  1. [Washington, D.C.] : NASA ; Springfield, Va. : For sale by the National Technical Information Service, [1990]
Series
  1. NASA technical memorandum ; 102544
Bibliography
  1. Includes bibliographical references (p. 13).
Additional formats
  1. Also available via Internet from the NASA Technical Report Server web site. Address as of 5/9/06: http://ntrs.nasa.gov/archive/nasa/casi.ntrs.nasa.gov/19900011077%5F1990011077.pdf ; current access is available via PURL.
Reproduction
  1. Microfiche. [Washington, D.C. : National Aeronautics and Space Administration], 1990. 1 microfiche : negative.
Connect to:
  1. http://purl.access.gpo.gov/GPO/LPS69699
Added author
  1. Pantic, Dragan M.
  2. Electrochemical Society.
  3. United States. National Aeronautics and Space Administration.
  4. Symposium on Dielectric Films on Compound Semiconductors.
Gpo item no.
  1. 0830-D (MF)
  2. 0830-D (online)
Sudoc no.
  1. NAS 1.15:102544
Research call number
  1. GPO Microfiche NAS 1.15:102544
  2. GPO Internet NAS 1.15:102544
View in legacy catalog