The physics of submicron lithography
- Title
- The physics of submicron lithography / Kamil A. Valiev.
- Published by
- New York : Plenum Press, [1992], ©1992.
- Author
Items in the library and off-site
Displaying 1 item
Status | Format | Access | Call number | Item location |
---|---|---|---|---|
Status | FormatText | AccessRequest in advance | Call numberTK7874 .V336 1992 | Item locationOff-site |
Details
- Description
- xi, 493 pages : illustrations; 26 cm.
- Series statement
- Microdevices
- Uniform title
- Microdevices.
- Subject
- Owning institution
- Columbia University Libraries
- Bibliography (note)
- Includes bibliographical references and index.