The physics of submicron lithography

Title
  1. The physics of submicron lithography / Kamil A. Valiev.
Published by
  1. New York : Plenum Press, [1992], ©1992.
Author
  1. Valiev, K. A. (Kamilʹ Akhmetovich)

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StatusFormatTextAccessRequest in advanceCall numberTK7874 .V336 1992Item locationOff-site

Details

Description
  1. xi, 493 pages : illustrations; 26 cm.
Series statement
  1. Microdevices
Uniform title
  1. Microdevices.
Subject
  1. Lithography, Electron beam
  2. Physics
  3. X-ray lithography
  4. Ion beam lithography
Owning institution
  1. Columbia University Libraries
Bibliography (note)
  1. Includes bibliographical references and index.