Research Catalog

Modeling of chemical vapor deposition of tungsten films

Title
  1. Modeling of chemical vapor deposition of tungsten films / Chris R. Kleijn, Christoph Werner.
Published by
  1. Basel ; Boston : Birkhäuser Verlag, 1993.
Author
  1. Kleijn, Chris R., 1960-

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Details

Additional authors
  1. Werner, Christoph, 1949-
Description
  1. 138 pages : illustrations; 23 cm.
Series statement
  1. Progress in numerical simulation for microelectronics ; vol. 2
Uniform title
  1. Progress in numerical simulation for microelectronics ; v. 2.
Subject
  1. Vapor-plating > Mathematical models
  2. Semiconductor films > Mathematical models
Owning institution
  1. Columbia University Libraries
Bibliography (note)
  1. Includes bibliographical references.