Research Catalog

Multilevel interconnection : issues that impact competitiveness : 27-28 September 1993, Monterey, California

Title
  1. Multilevel interconnection : issues that impact competitiveness : 27-28 September 1993, Monterey, California / Hoang H. Hoang [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Published by
  1. Bellingham, Wash., USA : SPIE, [1993], ©1993.

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Details

Additional authors
  1. Hoang, Hoang H.
  2. Society of Photo-optical Instrumentation Engineers.
Description
  1. vii, 228 pages : illustrations; 28 cm.
Series statement
  1. Proceedings / SPIE--the International Society for Optical Engineering ; v. 2090
Uniform title
  1. Proceedings of SPIE--the International Society for Optical Engineering ; v. 2090.
Subject
  1. Integrated circuits > Very large scale integration > Design and construction > Congresses
  2. Integrated circuits > Very large scale integration > Materials > Congresses
  3. Metallizing > Congresses
Owning institution
  1. Columbia University Libraries
Bibliography (note)
  1. Includes bibliographical references and author index.