Research Catalog

IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany

Title
  1. IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany / sponsored by the IEEE Robotics and Automation Society ; in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg.
Published by
  1. [New York, N.Y.] : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : IEEE Service Center, [1998], ©1998.
Author
  1. IEEE Workshop on Micro Electro Mechanical Systems (11th : 1998 : Heidelberg, Germany)

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Details

Additional authors
  1. IEEE Robotics and Automation Society.
  2. American Society of Mechanical Engineers. Dynamic Systems and Control Division.
  3. Baden-Württemberg (Germany). Wirtschaftsministerium.
Description
  1. xxx, 666 pages : illustrations; 30 cm
Alternative title
  1. Proceedings
  2. 1998 IEEE Micro Electro Mechanical Systems
  3. Eleventh Annual International Workshop on Micro Electro Mechanical Systems
  4. 11th Annual International Workshop on Micro Electro Mechanical Systems
  5. Investigation of micro structures, sensors, actuators, machines and systems
  6. Micro Electro Mechanical Systems
  7. MEMS 98
Subject
  1. Microelectronics > Congresses
  2. Actuators > Congresses
  3. Electromechanical devices > Congresses
  4. Detectors > Congresses
Note
  1. "IEEE catalog number 98CH36176."
Bibliography (note)
  1. Includes bibliographical references and indexes.