Specimen preparation for transmission electron microscopy of materials IV : symposium held April 2, 1997, San Francisco, California, U.S.A.
- Title
- Specimen preparation for transmission electron microscopy of materials IV : symposium held April 2, 1997, San Francisco, California, U.S.A. / editors, Ronald M. Anderson, Scott D. Walck.
- Published by
- Pittsburgh, Pa. : Materials Research Society, [1997], ©1997.
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Status | Format | Access | Call number | Item location |
---|---|---|---|---|
Status | FormatText | AccessRequest in advance | Call numberTA417.23 .S633 1997 | Item locationOff-site |
Details
- Additional authors
- Description
- xi, 295 pages : illustrations; 24 cm.
- Series statement
- Materials Research Society symposium proceeedings ; v. 480
- Uniform title
- Materials Research Society symposia proceedings ; v. 480.
- Subject
- Contents
- Transmission-Electron-Microscopy-Specimen Preparation of Ceramic Coatings on Ceramic Fibers / M. K. Cinibulk, J. R. Welch and R. S. Hay -- Focused-Ion-Beam Milling and Micromanipulation Lift-Out for Site-Specific-Cross-Section TEM Specimen Preparation / L. A. Giannuzzi, J. L. Drown and S. R. Brown [et al.] -- Rocking-Angle Ion-Milling of Cross-Sectional Samples for Transmission Electron Microscopy of Multilayer Systems / Jeong Soo Lee, Hyun Ha Kim and Young Woo Jeong -- Focused-Ion-Beam Sample Preparation of Non-Semiconductor Materials / M. W. Phaneuf, N. Rowlands and G. J. C. Carpenter [et al.] -- Surface Science Aspects of Contamination in TEM Sample Preparation / John T. Grant, Scott D. Walck and Frank J. Scheltens [et al.] -- Two-View Small-Angle Wedge Sample Preparation by Hand Tools for Transmission Electron Microscopy of Semiconductors and Related Materials / Suli Suder, C. A. Faunce and S. E. Donnelly --
- Two-Dimensional Profiling of Dopants in Semiconductor Devices Using Preferential Etching/TEM Method / H. Kimura and K. Shimizu -- XTEM Sample Preparation for Failure Analysis in Semiconductor Devices Using High-Energy Ion-Beam Thinning / E. Bugiel -- A Novel Sample Design for Easier X-TEM Specimen Preparation of Surface Coated, Hardened High-Speed Steel / Klaus F. Ostergaard and K. A. Morch -- A Detailed Procedure for Reliable Preparation of TEM Samples Using FIB Milling / D. H.-I. Su, H. T. Shishido and F. Tsai [et al.] -- The Preparation of Submicron Precision Cross Sections by Dimpling with a "Flatting Tool" / Helen L. Humiston -- Applications of Reactive Gas Plasma Cleaning Technology in Minimizing Contamination of Specimens During Transmission and Analytical Microscopy / S. P. Roberts, N. J. Zaluzec and S. D. Walck [et al.] --
- The Effects of Gas Composition on the Ion Milling of Cross-Sectional TEM Samples Containing Carbon Layers / Scott D. Walck, Frank J. Scheltens and Josekutty J. Nainaparampil -- The Small-Angle Cleavage Technique: An Update / Scott D. Walck and John P. McCaffrey -- Evaluation of a New Strategy for Transverse TEM Specimen Preparation by Focused-Ion-Beam Thinning / F. Shaapur, T. Stark and T. Woodward [et al.] -- An Improved Tool for Wedge Polishing of Materials for TEM / F. Shaapur and J. Rimer -- Combined Tripod Polishing and FIB Method of Preparing Semiconductor Plan View Specimens / Ron Anderson and Stanley J. Klepeis -- A New Tripod Polisher Method for Preparing TEM Specimens of Particles and Fibers / Ron Anderson and Stanley J. Klepeis --
- Preparation of Cross-Section TEM Specimens of Semiconductors Containing Tungsten Interconnects Using Chemical Mechanical Polishing and Chemically Assisted Ion Beam Milling, and Use of AFM to Evaluate the Success of These Procedures / Robert Jamison, John Mardinly and David Susnitzky [et al.] -- Cross-Sectional TEM Sample Preparation Method Using FIB Etching for Thin-Film Transistor / K. Tsujimoto, S. Tsuji and H. Takatsuji [et al.] -- Cross-Sectional TEM Sample Preparation Using E-Beam Lithography and Reactive Ion Etching / Hyun-Jin Cho, Peter B. Griffin and James D. Plummer -- The Use of Cold Gas Plasma for the Final Processing of Contamination-Free TEM Specimens / F. E. Fischione, J. Ringnalda and Y. Feng [et al.] -- A New Procedure for Making TEM Specimens of Superconductor Devices / Y. Huang and K. L. Merkle -- Preparation of Multilayered Materials in Cross-Section for In Situ TEM Tensile Deformation Studies / M. A. Wall and T. W. Barbee, Jr. --
- Cross-Sectional TEM Sample Preparation of Phase-Change Optical Disk by Ion Milling / T. Kouzaki, K. Yoshioka and E. Ohno -- In Situ Transmission Electron Microscopy of the Solid-Phase Epitaxial Growth of GaAs: Sample Preparation and Artifact Characterization / D. J. Llewellyn, K. B. Belay and M. C. Ridgway -- An Updated Ion-Polishing System for TEM Specimen Preparation of Materials / R. Alani, R. J. Mitro and P. R. Swann.
- Owning institution
- Columbia University Libraries
- Bibliography (note)
- Includes bibliographical references and indexes.