Emerging lithographic technologies III : 15-17 March, 1999, Santa Clara, California
- Title
- Emerging lithographic technologies III : 15-17 March, 1999, Santa Clara, California / Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
- Published by
- Bellingham, Washington : SPIE, [1999], ©1999.
Items in the library and off-site
Displaying all 2 items
Status | Vol/date | Format | Access | Call number | Item location |
---|---|---|---|---|---|
Status | Vol/datep.1 | FormatText | AccessRequest in advance | Call numberTK7874 .E523 1999g p.1 | Item locationOff-site |
Status | Vol/datep.2 | FormatText | AccessRequest in advance | Call numberTK7874 .E523 1999g p.2 | Item locationOff-site |
Details
- Additional authors
- Description
- 2 volumes (xvii, 864 pages) : illustrations; 28 cm.
- Series statement
- Proceedings of SPIE ; v. 3676
- Uniform title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 3676.
- Subject
- Owning institution
- Columbia University Libraries
- Bibliography (note)
- Includes bibliographical references and author index.