Research Catalog

Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California

Title
  1. Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California / Anthony J. Toprac, Kim Dang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society [and others].
Published by
  1. Bellingham, Wash., USA : SPIE, [1999], ©1999.

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Details

Additional authors
  1. Toprac, Anthony J. (Anthony John), 1955-
  2. Dang, Kim.
  3. Society of Photo-optical Instrumentation Engineers.
  4. Electrochemical Society.
Description
  1. vii, 310 pages : illustrations; 28 cm.
Series statement
  1. SPIE proceedings series ; v. 3882
Uniform title
  1. Proceedings of SPIE--the International Society for Optical Engineering ; v. 3882.
Subject
  1. Metallizing > Congresses
  2. Plasma etching > Congresses
  3. Integrated circuits > Design and construction > Congresses
  4. Dielectric films > Congresses
  5. Process control > Congresses
Owning institution
  1. Columbia University Libraries
Bibliography (note)
  1. Includes bibliographical references and index.