Emerging lithographic technologies VI : 5-7 March, 2002, Santa Clara, [California], USA
- Title
- Emerging lithographic technologies VI : 5-7 March, 2002, Santa Clara, [California], USA / Roxann L. Engelstad, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH.
- Published by
- Bellingham, Washington : SPIE, [2002], ©2002.
Items in the library and off-site
Displaying all 2 items
Status | Vol/date | Format | Access | Call number | Item location |
---|---|---|---|---|---|
Status | Vol/datev.1 | FormatText | AccessRequest in advance | Call numberTK7874 .E523 2002g v.1 | Item locationOff-site |
Status | Vol/datev.2 | FormatText | AccessRequest in advance | Call numberTK7874 .E523 2002g v.2 | Item locationOff-site |
Details
- Additional authors
- Description
- xiv pages, 508 unnumbered pages : illustrations; 28 cm.
- Series statement
- Proceedings of SPIE ; v. 4688
- Uniform title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 4688.
- Subject
- Owning institution
- Columbia University Libraries
- Bibliography (note)
- Includes bibliographic references and author index.