Research Catalog

Silicon-on-insulator : its technology and applications / edited by S. Furukawa.

Title
  1. Silicon-on-insulator : its technology and applications / edited by S. Furukawa.
Published by
  1. Tokyo : KTK Scientific Publishers ; Boston : D. Reidel ; Hingham, MA : Sold and distributed in the U.S.A. and Canada by Kluwer Academic Publishers, 1985.

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FormatTextAccessRequest in advanceCall numberTK7871.85 .S548 1985Item locationOff-site

Details

Additional authors
  1. Furukawa, S. (Seijirō), 1934-
  2. National Science Foundation (U.S.) http://id.loc.gov/authorities/names/n79005681
  3. Nihon Gakujutsu Shinkōkai. http://id.loc.gov/authorities/names/n79079558
  4. US-Japan Seminar on "Solid Phase Epitaxy and Interface Kinetics" (1983 : Ōiso-machi, Japan) http://id.loc.gov/authorities/names/n84173230
Description
  1. viii, 295 pages : illustrations; 24 cm
Uniform title
  1. Layered structures and interface kinetics.
Subject
  1. Solid state electronics > Congresses
  2. Silicon > Congresses
  3. Epitaxy > Congresses
  4. Integrated circuits > Design and construction > Congresses
Owning institution
  1. Columbia University Libraries
Note
  1. "Papers presented during the US-Japan Seminar on 'Solid Phase Epitaxy and Interface Kinetics' held in Oiso, Japan, June 20-24, 1983 ... co-sponsored by National Science Foundation and Japan Society for the Promotion of Science"--P. 5.
  2. Companion volume containing the other papers presented at seminar published under title: Layered structures and interface kinetics.
  3. "ASST, advances in solid state technology"--Cover.
Bibliography (note)
  1. Includes bibliographies and index.