Emerging lithographic technologies VII : 25-27 February, 2003, Santa Clara, California, USA
- Title
- Emerging lithographic technologies VII : 25-27 February, 2003, Santa Clara, California, USA / Roxann L. Engelstad, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH.
- Published by
- Bellingham, Wash. : SPIE, c2003.
Items in the library and off-site
Displaying all 2 items
Status | Vol/date | Format | Access | Call number | Item location |
---|---|---|---|---|---|
Status | Vol/datept.2 | FormatText | AccessUse in library | Call numberTK7874 .E523 2003g pt.2 | Item locationOff-site |
Status | Vol/datept.1 | FormatText | AccessUse in library | Call numberTK7874 .E523 2003g pt.1 | Item locationOff-site |
Details
- Additional authors
- Description
- 2 v. : ill.; 28 cm.
- Series statement
- Proceedings of SPIE ; v. 5037
- Uniform title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 5037.
- Subject
- Owning institution
- Columbia University Libraries
- Bibliography (note)
- Includes bibliographical references and author index.