Electron-beam, X-ray, and ion-beam lithographies VI : 5-6 March 1987, Santa Clara, California
- Title
- Electron-beam, X-ray, and ion-beam lithographies VI : 5-6 March 1987, Santa Clara, California / Phillip D. Blais, chair/editor.
- Published by
- Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 1987.
Items in the library and off-site
Displaying 1 item
Status | Format | Access | Call number | Item location |
---|---|---|---|---|
Status | FormatText | AccessRequest in advance | Call numberTK7874 .E4775 1987g | Item locationOff-site |
Details
- Additional authors
- Description
- vi, 265 pages : illustrations; 28 cm.
- Series statement
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 773
- Uniform title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 773.
- Subject
- Owning institution
- Columbia University Libraries
- Bibliography (note)
- Includes bibliographies and index.