Electron-beam, X-ray, and ion-beam lithographies VI : 5-6 March 1987, Santa Clara, California

Title
  1. Electron-beam, X-ray, and ion-beam lithographies VI : 5-6 March 1987, Santa Clara, California / Phillip D. Blais, chair/editor.
Published by
  1. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 1987.

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StatusFormatTextAccessRequest in advanceCall numberTK7874 .E4775 1987gItem locationOff-site

Details

Additional authors
  1. Blais, Phillip D.
Description
  1. vi, 265 pages : illustrations; 28 cm.
Series statement
  1. Proceedings of SPIE--the International Society for Optical Engineering ; v. 773
Uniform title
  1. Proceedings of SPIE--the International Society for Optical Engineering ; v. 773.
Subject
  1. X-ray lithography > Congresses
  2. Microlithography > Congresses
  3. Ion beam lithography > Congresses
  4. Lithography, Electron beam > Congresses
Owning institution
  1. Columbia University Libraries
Bibliography (note)
  1. Includes bibliographies and index.