Research Catalog

Ion beam assisted film growth

Title
  1. Ion beam assisted film growth / edited by Tadatsugu Itoh.
Published by
  1. Amsterdam ; New York : Elsevier, 1989.

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FormatTextAccessRequest in advanceCall numberQC176.9.M84 I58 1989Item locationOff-site

Details

Additional authors
  1. Itoh, Tadatsugu.
Description
  1. xvii, 439 pages : illustrations; 25 cm.
Series statement
  1. Beam modification of materials ; 3
Uniform title
  1. Beam modification of materials ; 3.
Subject
  1. Semiconductor films
  2. Sputtering (Physics)
  3. Ion bombardment
  4. Thin films, Multilayered
Owning institution
  1. Columbia University Libraries
Bibliography (note)
  1. Includes bibliographies and indexes.