Technology of proximal probe lithography / Christie R.K. Marrian, editor.

Title
  1. Technology of proximal probe lithography / Christie R.K. Marrian, editor.
Published by
  1. Bellingham, Wash. : SPIE Optical Engineering Press, c1993.

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StatusFormatTextAccessRequest in advanceCall numberTK7874.8 .T43 1993Item locationOff-site

Details

Additional authors
  1. Marrian, Christie R. K.
Description
  1. xi, 413 p. : ill.; 26 cm.
Series statement
  1. SPIE institutes for advanced optical technologies ; v. IS 10
Uniform title
  1. SPIE institutes for advanced optical technologies v. IS 10.
Subject
  1. Molecular electronics
  2. Lithography, Electron beam
  3. Probes (Electronic instruments)
  4. Nanotechnology
Owning institution
  1. Harvard Library
Bibliography (note)
  1. Includes bibliographical references.
Processing action (note)
  1. committed to retain