Advances in resist technology : March 12-13, 1984, Santa Clara, California /

Title
  1. Advances in resist technology : March 12-13, 1984, Santa Clara, California / C. Grant Willson, chairman/editor.
Published by
  1. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1984.

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Additional authors
  1. SPIE--the International Society for Optical Engineering. (uri)http://id.loc.gov/authorities/names/n78088934
  2. Willson, C. G. (C. Grant), 1939-
Description
  1. vi, 195 p. : ill.; 28 cm.
Series statement
  1. Proceedings of SPIE--the International Society for Optical Engineering ; v. 469
Subject
  1. Integrated circuits > Masks > Congresses
  2. Lithography, Electron beam > Congresses
  3. Photoresists > Congresses
Owning institution
  1. Princeton University Library
Bibliography (note)
  1. Includes bibliographical references and index.