Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California /
- Title
- Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California / Larry F. Thompson, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.
- Published by
- Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1985.
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Status Not available - Please for assistance. | FormatText | AccessUse in library | Call numberTK8331 .A383 | Item locationOff-site |
Details
- Additional authors
- Description
- vi, 350 p. : ill.; 28 cm.
- Series statement
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 539
- Subject
- Owning institution
- Princeton University Library
- Bibliography (note)
- Includes bibliographies and index.