Electron-beam technology in microelectronic fabrication /
- Title
- Electron-beam technology in microelectronic fabrication / edited by George R. Brewer.
- Published by
- New York : Academic Press, 1980.
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Status Not available - Please for assistance. | FormatText | AccessUse in library | Call numberTK7874 .E48 | Item locationOff-site |
Details
- Additional authors
- Description
- xi, 362 p. : ill.; 24 cm.
- Subject
- Owning institution
- Princeton University Library
- Bibliography (note)
- Includes bibliographies and index.