Electron-beam technology in microelectronic fabrication /

Title
  1. Electron-beam technology in microelectronic fabrication / edited by George R. Brewer.
Published by
  1. New York : Academic Press, 1980.

Items in the library and off-site

Filter by

Displaying 1 item

StatusFormatAccessCall numberItem location
Status

Not available - Please for assistance.

FormatTextAccessUse in libraryCall numberTK7874 .E48Item locationOff-site

Details

Additional authors
  1. Brewer, George Raymond, 1922-
Description
  1. xi, 362 p. : ill.; 24 cm.
Subject
  1. Lithography, Electron beam
  2. Microelectronics
Owning institution
  1. Princeton University Library
Bibliography (note)
  1. Includes bibliographies and index.