Proceedings of the Symposium on Etching for Pattern Definition

Title
  1. Proceedings of the Symposium on Etching for Pattern Definition / edited by Henry G. Hughes, Myron J. Rand.
Published by
  1. Princeton, N.J. : Dielectrics and Insulation and Electronics Divisions, Electrochemical Society, c1976.
Author
  1. Symposium on Etching for Pattern Definition (1976 : Washington, D.C.)

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Details

Additional authors
  1. Hughes, Henry G.
  2. Rand, Myron J.
  3. Electrochemical Society
Description
  1. vi, 203 p. : ill.; 23 cm.
Subject
  1. Semiconductors > Etching > Congresses
  2. Metals > Etching > Congresses
  3. Integrated circuits > Congresses
Owning institution
  1. Princeton University Library
Note
  1. Held at the spring, 1976, meeting of the Electrochemical Society in Washington, D.C.
Bibliography (note)
  1. Includes bibliographical references and index.