Research Catalog

Microelectromechanical systems : (MEMS)

Title
  1. Microelectromechanical systems : (MEMS) / presented at the ... International Mechanical Engineering Congress and Exposition.
Published by
  1. New York, N.Y. : American Society of Mechanical Engineers

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Vol/date2005, v.7FormatTextAccessUse in libraryCall numberTK7874 .M5275 2005, v.7Item locationOff-site
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Vol/date2004FormatTextAccessUse in libraryCall numberTK7874 .M5275 2004Item locationOff-site
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Details

Additional authors
  1. American Society of Mechanical Engineers.
  2. American Society of Mechanical Engineers. Dynamic Systems and Control Division.
Description
  1. v. : ill.; 28 cm.
Series statement
  1. <1996>-1997: DSC
  2. 1997- : HTD
  3. <1999-2001>: MEMS
Uniform title
  1. DSC (Series)
  2. HTD (Series)
  3. Microelectromechanical systems series
Alternative title
  1. Microelectromechanical systems
  2. MEMS
  3. Micro-electro-mechanical systems (MEMS)
Subject
  1. Microelectromechanical systems > Congresses
  2. Electromechanical devices > Congresses
  3. Microelectronics > Congresses
Note
  1. Description based on: 1997.
Issued by (note)
  1. Sponsored by: Dynamic Systems and Control Division, ASME.