Research Catalog

X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York

Title
  1. X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York / Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--The International Society for Optical Engineering.
Published by
  1. Bellingham, Wash. : SPIE--The International Society for Optical Engineering, c1984.

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Details

Additional authors
  1. Wilson, Alan D.
  2. National Synchrotron Light Source (Organization : U.S.)
  3. Society of Photo-optical Instrumentation Engineers.
Description
  1. vi, 140 p. : ill.; 28 cm.
Series statement
  1. Proceedings of SPIE--the International Society for Optical Engineering ; v. 448
Subject
  1. X-rays > Industrial applications > Congresses
  2. Lithography, Electron beam > Congresses
  3. Photoresists > Congresses
  4. Masks (Electronics) > Congresses
Owning institution
  1. Princeton University Library
Bibliography (note)
  1. Includes bibliographies and index.