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Interface control of electrical, chemical, and mechanical properties / editors, S.P. Murarka [and others].

Text

Pittsburgh : Materials Research Society, 1994.

1994

1 item

FormatCall numberItem location
FormatTextCall numberTK7871.85 .I573 1994Item locationOff-site

Chemical mechanical planarization of microelectronic materials / Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann.

Text

New York : J. Wiley, [1997], ©1997.

1997-1997

1 item

FormatCall numberItem location
FormatTextCall numberTK7871 .S77 1997Item locationOff-site

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