Home
/
arrow icon
Research
/
Research Catalog
Research Catalog
Search
Subject Heading Explorer
My Account
Request for on-site use
Title
Electron-beam, X-ray, and ion-beam technology : submicrometer lithographies IX : 7-8 March 1990, San Jose, California / Douglas J. Resnick, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Call number
TK7874 .E4356
Choose a pickup location
Pickup location
(required)
Submit request
Help and Feedback