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Laser microfabrication : thin film processes and lithography / edited by Daniel J. Ehrlich, Jeffrey Y. Tsao.
Text
Boston : Academic Press, c1989.
1989
1 item
| Format | Call number | Item location |
|---|---|---|
| FormatText | Call numberJSE 89-1648 | Item locationOffsite |
Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA / editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko.
Text
Pittsburgh, Pa. : Materials Research Society, c1988.
1988
1 item
| Format | Call number | Item location |
|---|---|---|
| FormatText | Call numberJSE 88-677 | Item locationOffsite |
Emerging technologies for in situ processing / edited by Daniel J. Ehrlich and Van Tran Nguyen.
Text
Dordrecht ; Boston : M. Nijhoff ; Hingham, MA, USA : Distributors for the U.S. and Canada, Kluwer Academic Publishers, 1988.
1988
1 item
| Format | Call number | Item location |
|---|---|---|
| FormatText | Call numberJSE 88-3506 | Item locationOffsite |
Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A. / editors, A. Wayne Johnson, Daniel J. Ehrlich, Howard R. Schlossberg.
Text
New York : North-Holland, c1984.
1984
1 item
| Format | Call number | Item location |
|---|---|---|
| FormatText | Call numberQD506.A1 L37 1984 | Item locationOff-site |
Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA / editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko.
Text
Pittsburgh, Pa. : Materials Research Society, [1988], ©1988.
1988-1988
1 item
| Format | Call number | Item location |
|---|---|---|
| FormatText | Call numberTK7874 .L297 1988 | Item locationOff-site |
Proceedings of the Symposium on Laser Processes for Microelectronic Applications / edited by J.J. Ritsko, D.J. Ehrlich, M. Kashiwagi.
Text
Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, [1988], ©1988.
1988-1988
1 item
| Format | Call number | Item location |
|---|---|---|
| FormatText | Call numberTK7874 .S935 1987 | Item locationOff-site |
Emerging technologies for in situ processing / edited by Daniel J. Ehrlich and Van Tran Nguyen.
Text
Dordrecht ; Boston : M. Nijhoff ; Norwell, MA, USA : Distributors for the U.S. and Canada, Kluwer Academic Publishers, 1988.
1988
1 item
| Format | Call number | Item location |
|---|---|---|
| FormatText | Call numberTK7874 .N334 1987 | Item locationOff-site |
Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A. / editors, A. Wayne Johnson, Daniel J. Ehrlich, Howard R. Schlossberg.
Text
New York : North-Holland, c1984.
1984
1 item
| Format | Call number | Item location |
|---|---|---|
| FormatText | Call numberQD506.A1 L37 1984 | Item locationOff-site |
Lasers in microlithography : 2-3 March, 1987, Santa Clara, California / Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Text
Bellingham, Wash., USA : The Society, c1987.
1987
1 item
| Format | Call number | Item location |
|---|---|---|
| FormatText | Call numberTK7874 .L37 | Item locationOff-site |
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