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Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003, Santa Clara, California, USA / Kenneth W. Tobin, Jr., Iraj Emami, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
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Bellingham, Wash., USA : SPIE, [2003], ©2003.
2003-2003
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| Format | Call number | Item location |
|---|---|---|
| FormatText | Call numberTK7874 .P745 2003g | Item locationOff-site |
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