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Process, equipment, and materials control in integrated circuit manufacturing II : 16-17 October 1996, Austin, Texas / Armando Iturralde, Te-Hua Lin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and others].
Text
Bellingham, Wash., USA : SPIE, [1996], ©1996.
1996-1996
1 item
Format | Call number | Item location |
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FormatText | Call numberTK7874 .P76 1996g | Item locationOff-site |
Process, equipment, and materials control in integrated circuit manufacturing II : 16-17 October, 1996, Austin, Texas / Armando Iturralde, Te-Hua Lin, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.
Text
Bellingham, Wash., USA : SPIE, c1995.
1996
1 item
Format | Call number | Item location |
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FormatText | Call numberTA1505 .P762 vol.2876 | Item locationOff-site |
Process, equipment, and materials control in integrated circuit manufacturing II : 16-17 October 1996, Austin, Texas / Armando Iturralde, Te-Hua Lin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and others].
Text
Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1996.
1996
1 item
Format | Call number | Item location |
---|---|---|
FormatText | Call numberTA1505 .P762 vol.2876 | Item locationOff-site |